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Silane SiH4
Dec 11, 2017


Name: Sulfane

synonyms: flots100sco; Monosilane; SiH4; Silicane; Silicon hydride; Silicon hydride (SiH4); tetrahydrure; tetrahydruredesilicium

CAS: 7803-62-5

Molecular formula: SiH4

Molecular weight: 32.12

EINECS: 232-263-4

Silane is a colorless, air responsive and asphyxiating gas. The gas usually contacts with the air to cause combustion and release very strong white amorphous silica fumes. Its primary health hazard is that its self burning flame can cause severe heat burns, if it is serious or even fatal. If a flame or high temperature is used in a part of the cylinder of a silane, the cylinder will explode before the safety valve is started. If the pressure is too high or the speed is too fast, the delay can be caused by the release of silane. The leakage of silane, if not spontaneous, will be very dangerous and do not close. The personnel dealing with the emergency must have personal protective equipment and adapt to the fire protection of the situation at that time. Do not try to extinguish the fire before cutting off the gas source.

Product use:

Silane is widely used in the microelectronics and optoelectronic industry. It can be used in the manufacture of high purity polysilicon, monocrystalline silicon, microcrystalline silicon, amorphous silicon, silicon nitride, silicon oxide, silicon carbide, Silicon Heterostructure, various metal silicides and so on. Because of its high purity and fine control, it has become an important special gas that can not be replaced by many other silicon sources.

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