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High Purity Gases The Details Of The Introduction
May 26, 2017

 High Purity Gases In the case of nitrogen, hydrogen, argon, and helium, the purity of the pure gas is usually higher than or equal to 99.999%, and the purity is 99.99% for oxygen. Called high purity oxygen; for hydrocarbons, the purity of 99.99% can be considered high purity gas. High purity gas applications are extremely wide in the semiconductor industry, high purity nitrogen, hydrogen, argon, helium can be used as carrier gas and protective gas; high purity gas can be used as a gas mixture. [1] 

High purity gas according to the different molecular structure can be divided into organic high purity gas, and inorganic high purity gas,

  High Purity Gases Organic high purity gas


Methane (CH4), ethane (C2H6), propane (C3H8), cyclopropane (cyc-C3H6), n-butane (n-C4H10), isobutane (i-C4H10) Neopentane (neo-C5H12), methyl chloride (CH3Cl), ethyl chloride (C2H5Cl), trifluoromethane (CHF3), ethylene oxide (C2H4O), arsine (AsH3), phosphine (PH3) Borane (B2H6), silane (SiH4) and the like;


Ethylene glycol (C2H4), propylene (C3H6), propadiene (C3H4 ==), 1-butene (1-C4H8), isobutylene (i-C4H8), trans-2-butene (t-2-C4H8) Cis-2-butene (c-2-C4H8), 1.2-butadiene (1.2-C4H6), 1,3-butadiene (1.3-C4H6), vinyl chloride (C2H3Cl)


(C2H2), 1-butyne (1-C4H6), 2-butyne (2-C4H6), methylacetylene (C3H4), vinyl acetylene (C4H4 = ≡)


Dimethyl ether (C2H6O), methyl mercaptan (CH4S), fumigant (C2H4O-CO2), etc.

High Purity Gases Inorganic high purity gas

(Ne), krypton (Kr), xenon (Xe), nitrogen (N2), argon (Ar), helium (He), neon (Ne) Wait;

2, ammonia (NH3), chlorine (Cl2), sulfur dioxide (SO2), carbon monoxide (CO), carbon dioxide (CO2), nitrogen dioxide (NO2), nitrous oxide (N2O), carbon sulfide (COS) (HCl), hydrogen bromide (HBr), hydrogen sulfide (H2S)

3, boron trifluoride (BF3), boron trichloride (BCl3), carbon tetrafluoride (CF4), silicon tetrafluoride (SiF4), silicon tetrachloride (SiCl4), sulfur hexafluoride (SF6) The

High Purity Gases Common use of high purity gases

Ethylene oxide can be used to produce plasticizers, lubricants and so on;

Chloromethane is an important methylating agent, but also for refrigerant, foaming agent;

Chloroethane can be used as an aerosol, a refrigerant, a gasoline shock agent, a local anesthetic;

Dimethyl ether can be used as jet propellant, refrigerant, anesthetic; methyl mercaptan for synthetic dyes, pharmaceuticals, pesticides;

Acetylene can be directly used for metal cutting welding, atomic absorption; vinyl acetylene mainly as chloroprene rubber raw materials